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Lion Precision Capacitive Sensors
Lion PrecisionCapacitive Sensors

Capacitive Sensors

Lion Precision capacitive sensors provide sub-nanometer resolution for non-contact measurement of displacement, distance, position, oscillation, and vibration. Their CPL series drivers (CPL190, CPL290, CPL350, CPL590) pair with precision capacitive probes to form complete measurement systems for target materials including metals, ceramics, glass, silicon wafers, and thin films. The newest CPL590 digital capacitive sensor offers high-resolution, high-speed digital output in a 2U enclosure, while the C-Series probes are available in standard, high-temperature (to 150 °C), and submersible versions.

Applications

  • Semiconductor wafer thickness and flatness measurement on wafer inspection systems.
  • Spindle runout and thermal drift measurement on precision CNC machine tools.
  • Gap control and position measurement in disk drive and data storage manufacturing.
  • Vibration and oscillation measurement on precision equipment and R&D systems.
  • Thin film and coating thickness measurement using differential capacitive sensing.

Key Features

  • CPL190/290/350/590 driver electronics with sub-nanometer resolution.
  • Capacitive probes in standard, high-temperature (150 °C), and submersible versions.
  • Measurement bandwidth from DC to 15 kHz depending on driver model selection.
  • Target compatibility: metals, ceramics, glass, silicon, and non-conductive materials.
  • System accuracy class with thermal stability for long-duration precision measurements.

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